DCS(SiH2 Cl2) is used in the semiconductor process.
This is a silicon precursor gas used in combination with ammonia for SiH4 CVD.
DCS is also used for edposition of epitaxial silicon.
Specification
Analyzer
Purity
SiH₂Cl₂(DCS)
99.5%
Impurity
O₂+Ar
≤ 1.0 ppmv
GC
N₂
≤ 1.0 ppmv
GC
CO
≤ 1.0 ppmv
GC
CO₂
≤ 1.0 ppmv
GC
CH₄
≤ 1.0 ppmv
GC
H₂
≤ 10.0 ppmv
GC
SiH₃Cl(MCS)
≤ 1000 ppmv
GC
SiHCl₃(TCS)
≤ 500 ppmv
GC
SiCl₄(STC)
≤ 500 ppmv
GC
Type
40ℓ
10ℓ
Filling
37Kg
9Kg
Container Material
SUS316L
Valve
JIS22-14L
Shelf Life
1year
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